CCMP2
CHROMATIC CONFOCAL  MICROSCOPY POINT - 2 TECHNOLOGY


Bigger numerical aperture (Slope)

Small vertical resolution and large numerical aperture allows for accurate measurements on all types of material. Ideal for non-contact measurement of topography and layer thickness.

image

TECHNICAL SPECIFICATIONS FOR CCMP2

An objective colour L projects the image of a point source W along a continuum of monochromatic images located on the optical axis ("colour coding").

A sample placed in the area of colour coding shows the surface diffuse the incident light brush.

Backscattered light through the lens colour L in the opposite direction and arrives at a hole P that filters all wavelengths except one, λM.

The collected light is analyzed by a spectrograph S. The position of the sample is directly related to the wavelength detected λM.

A wide range of sensor are available with this version. It also offers significant numerical aperture.

   Chromatic confocal for distance & thickness

OPTICAL PROBECL300 µmCL1000 µm
Measuring Range300 µm1000 µm
Working distance1)
4.5 mm
19.1 mm
Resolution10 nm35 nm
Max slope 2)
+/-30°+/- 45°
Lateral resolution2.5 µm1.8 µm
Numerial operture0.70.26
Spot size5 µm3.5 µm

1) Bottom of probe to middle of measuring range
2) Decrasing accuracy on the limits
At Refractive index n = 1.5

Powered by MakeWebEasy.com