CHROMATIC CONFOCAL MICROSCOPY POINT - 2 TECHNOLOGY
Bigger numerical aperture (Slope)
Small vertical resolution and large numerical aperture allows for accurate measurements on all types of material. Ideal for non-contact measurement of topography and layer thickness.
TECHNICAL SPECIFICATIONS FOR CCMP2
An objective colour L projects the image of a point source W along a continuum of monochromatic images located on the optical axis ("colour coding").
A sample placed in the area of colour coding shows the surface diffuse the incident light brush.
Backscattered light through the lens colour L in the opposite direction and arrives at a hole P that filters all wavelengths except one, λM.
The collected light is analyzed by a spectrograph S. The position of the sample is directly related to the wavelength detected λM.
A wide range of sensor are available with this version. It also offers significant numerical aperture.
Chromatic confocal for distance & thickness
|OPTICAL PROBE||CL300 µm||CL1000 µm|
|Measuring Range||300 µm||1000 µm|
|Working distance1)||4.5 mm||19.1 mm|
|Resolution||10 nm||35 nm|
|Max slope 2)||+/-30°||+/- 45°|
|Lateral resolution||2.5 µm||1.8 µm|
|Spot size||5 µm||3.5 µm|
1) Bottom of probe to middle of measuring range
2) Decrasing accuracy on the limits
At Refractive index n = 1.5