ECCO 95: 
HIGH SPEED 3D SCANNING, ULTRA-HIGH RESOLUTION AND SUPERIOR IMAGE QUALITY

As the premium sensor series, the ECCO 95 sensors combine high resolution and measurement speed. This is made possible by the new sensor platform with innovative electronic design along with blue laser technology and a tailor-made optics. Particularly in the semiconductor, electronics and solar industries, the ECCO 95.010 delivers impressive results.


  Datasheet ECCO 95

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PROPERTIES & BENEFITS

  High Speed 3D scanning – For faster production lines & throughput

  Ultra-High Resolution – Resolve extremely fine features

  Superior 3D Image Quality – Best repeatability under challenging conditions


ECCO 95.010ECCO 95.020ECCO 95.040 ECCO 95.100ECCO 95.200
Typical field of view (near | mid | far) (1)10.5 | 11 | 11.5 mm22 | 25 | 28 mm 34 | 36 | 38 mm72 | 98 | 124 mm125 | 190 | 280 mm
Typical measurement range (1)5 mm16 mm 16 mm100 mm250 mm
Stand-off distance23.5 mm63 mm 55 mm 150 mm325 mm
Typical vertical resolution (Z) (1)0.37-0.45 μm1.1 – 1.6 µm 1.4-1.8 μm5 – 12 µm 12-50 μm
Typical lateral resolution (Y) (1)5.8-6.8 μm11.5 – 14.5 µm 18-20 μm42 – 70 µm 66-138 μm
Z-linearity (2), (5)0.015 %0.005% 0.006%0.002% 0.015 %
Z-repeatability (4), (5)0.1 µm0.2 µm 0.4 μm2 µm3.3 μm
weightApprox. 650gApprox. 650gApprox. 490 gApprox. 490 gApprox. 490 g
part numbers3.002.152 (2M) | 3.004.151 (3R) | 3.003.152 (3B)3.002.151 (2M) | 3.004.151 (3R) | 3.003.151 (3B)3.002.153 (2M) | 3.004.153 (3R) | 3.003.153 (3B)3.002.150 (2M) | 3.004.150 (3R) | 3.003.150 (3B)3.006.154 (2M) | 3.008.154 (3R) | 3.007.154 (3B)
      
Maximum points / 3D profile1920 
Typical scan rate (3)Approx. from 1 kHz up to 10 kHz
Typical 3D point rate (3)Approx. from 0.7 up to 15 million points/sec 
InterfaceGigabit Ethernet ( 1 Gbit/ sec)
Inputs2x Inputs (5 – 24 VDC)Quadrature Encoder (AB-Channel, RS-422 standard)
Outputs2 x Outputs, 24 VDC (max. 20 mA)
TriggerSTART Trigger support on Input 1 – 2
DATA Trigger support on Quadrature Encoder Input (Max. DATA trigger rate: 1 MHz)
DATA Trigger support on Input 2 (Max. DATA trigger rate: 10 kHz)
Input voltage | Power24 VDC, ± 15 % ripple | 8.5 W
Laser wavelength450 nm660nm red laser
Laser class (standard | optional)2M | 3R
Maximum ambient light10,000 lx
EMC testas per EN 61 000-6-2, EN 61 000-6-4
Vibration/ Shock testas per EN 60 086-2-6, -27, -29, -64
Electrical safetyas per EN 61 010-1-3
Protection classIII, as per EN 61 040-3
Enclosure ratingIP65
Air humidityMaximum 90%, non-condensing
Temperature (operation | storage)0 – 40° C | -20 – 70° C
Compatible accessoriesPower-I/O-Encoder cable: 6.320.0XXEthernet cable: 6.303.0XX


(1) Typical values can vary up to 5% due to optical tolerances

(2) Z-Linearity calculated as a variation of “bias” (reference value vs. measured value) over the measurement range

(3) Scan rate & point rate are dependent on the configured field of view, measurement range and exposure time. A ‘scan’ by definition considers maximum points/3D profile i.e. full FOV. The typical scan/point rate range has been estimated considering an exposure time of 1 µsec, min-max MR and full FOV. The typical scan rate can be further boosted by windowing the FOV

(4) Experimentally assessed by scanning a fixed measurement target 4100 times successively within short time interval. No post-processing filters applied

(5) Measurements performed on a SmartRay standard artifact which is an aluminium flat matt surface painted matte white

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