TR SCAN COMPACT WLI
HIGH PRECISION NON-CONTACT SURFACE MEASUREMENT
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The new TR Scan Compact WLI range allows measurements on any type of material with sub-nanometric resolution.

With its simplicity of use and small size it integrates easily in a lab environment and permit to realize quick and simple measurements.

  • Non-contact
  • Small footprint
  • Measuring range 400 µm
  • Resolution 0.1 nanometer
  • Extremely easy to use
  • 2.5x and 5x Michelson type optics for a wide field of view
  • Exchangeable optics, or mounted on a carousel
WLI (While Light Interferometry) technology combined with a piezo motor allows extremely fast measurements.
The table allows manual movement with workpieces weighing up to 5 kg.
Motorized tables are available as an option to extend the X&Y measuring range.
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Mounting Bases
The table's thumbwheel allows precise movement in X & Y.  

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Z-axis displacement

The Z-axis travel wheel has two functions: quick movement and fine positioning to easily adjust the working distance.

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Tilt Adjustment
The tilt adjustment of the table is done using the two knobs on the front of the table.
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Optics
A carousel of optics is available as an option.
TECHNICAL SPECIFICATIONS
Specifications
WLI 2.5x
WLI 5x
WLI 10x
WLI 20x
WLI 50x
WLI 100x
Resolution0.1 nm0.1 nm0.1 nm0.1 nm0.1 nm0.1 nm
Lateral resolution (X/Y)4.81 µm4.81 µm1.2 µm0.9 µm0.66 µm0.52 µm
Measuring range400 µm400 µm400 µm400 µm400 µm400 µm
Measuring range X/Y~4536 µm x ~3447 µm~2268 µm x ~1723 µm~1134 µm  x ~861 µm~567 µm   x ~430 µm~226 µm x ~172 µm~113 µm  x ~86 µm
Optical Zoom2.5x5x10x20x50x100x
Working distance~10.3 mm
~9.3 mm
~7.4 mm
~4.7 mm
~3.4 mm~3.4 mm
MODELS
SpecificationsValues
Conditions
01        Range Temp.
0 à 50 [°C]
02        Channels
2
03        Resolution
0.01 [°C]

04        Accuracy
±0.5 [°C]
With 2 points calibration and temperature reference:  20°C
05        Communication protocol
USB or serial comUSB by default
06        Power supply
From USB or Serial

07        Power supply
0.5 [W]
With 4 sensor configurations
08        Dimensions
82 x 102 x 36 [mm]
Without sensor
09        Weight350 [g]Without sensor
Temp. Sensors  
10        Type of sensorPT100LP2-PT100D-3.0-4L
11        Cable Lenght3 [m] 
12        ToleranceDIN EN 60751 Classes 1/3 DIN 
Serial Com configuration    
13        Baudrate9600 [bits/s] 
14        Bits8 
15        ParityNone 


ReferenceModel
Optics
Manual table
Motorized table
TR Scan Compact WLI
700 406 10 31TR Scan C. WLI MA 73x555x, 20x75x33
700 406 10 34TR Scan C. WLI MO 75x505x, 20x
75x50
700 406 10 35TR Scan C. WLI MO 100x1005x, 20x
100x100
TR Scan Extended WLI Multiple objectives (Carousel)
700 406 10 32
TR Scan E. WLI MA 73x55
5x, 10x, 50x
75x33
700 406 10 36
TR Scan E. WLI MO 75x50
5x, 10x, 50x

75x50
700 406 10 37
TR Scan E. WLI MO 100x100
5x, 10x, 50x

100x100
TECHNOLOGY WLI
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The piezo motor lifts the lens on the z-axis and the camera captures images in equidistant steps.

The image stack contains the information for calculating profile data from the surface.

Each independent pixel will have a so-called correlogram and the maximum variation of the sine light indicates a defined distance Z from the lens.

SOFTWARE
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The extremely simple Trimos Compact WLI software allows fast measurement even by an inexperienced user.

In addition to the 3D analysis software, it is possible to carry out any type of analysis on the measurements taken.

Developed around a graphic interface, the analysis software can work in 2D or 3D. Surface and profile extractions allow the analysis of all roughness parameters in 2D and 3D mode according to current standards.
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Additional software module : Contour Basic & Advance

The contour module enables additional measurements to be made on the extracted profile, such as angles, distances, radius calculation, as well as the comparison of a DXF with the contour.

OBJECTIVES
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Exchangeable Interference Objectives

- Mirau objectives are used for higher magnification (10x; 20x; 50x; 100x)- Michelson objectives are used for lower magnification (2.5x; 5x)

- The objectives are exchangeable and this can be used to adapt the system to the necessary field of view and resolution

- Interference pattern will pictured if object and reference beam have the same length
The interferometry provides the extreme height resolution of 0.1 nm for all objectives (in contrary to other principles as confocal microscopy and focus variation)

News optical 100x with CF Plan:

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